Analysis of Free-Space Optics Development
نویسندگان
چکیده
منابع مشابه
Micromachined Free-Space Integrated Optics
We report a novel surface-micromachined micro-optical bench (MOB) technology which enables us to monolithically integrate "flipped-up" free-space optical elements with micro-positioners and micro-actuators. This technology allows complete optical systems be implemented on a single Si chip using IC-like microfabrication processes. We have, for the first time, successfully fabricated micro-Fresne...
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A novel surface micro-machined micro-optical bench (MOB) has been demonstrated. Free-space micro-optics such as micro-Fresnel lenses, rotatable mirrors, beam-splitters and gratings are implemented on a single Si chip using IC-like microfabrication processes. Self-aligned hybrid integration with semiconductor lasers are also demonstrated for the first time. The MOB technology realizes a microopt...
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ژورنال
عنوان ژورنال: Metrology and Measurement Systems
سال: 2017
ISSN: 2300-1941
DOI: 10.1515/mms-2017-0060